ECC (Electrostatic Chuck Controller)
ECC (Electrostatic Chuck Controller) is an electronic subassembly controls the power applied when chucking and de-chucking a wafer from process chamber platens or pedestals. Process tools vary their pedestal design therefore each will have a different ECC.
| Description | Our P/N | OEM P/N | OEM Process Tool |
|---|---|---|---|
| ECC 1-1 | 61648-001 | 27-034079-01 | Novellus / LAM Research Speed |
| ECC 1-1M | 62733-001 | 27-266302-00 | Novellus / LAM Research |
| ECC 1-4F | 62671-001 | 27-153218-00 | Novellus / LAM Research Sequel |
| ECC 3-2 | 62683-001 | 27-285547-00 | Novellus / LAM Research |