SRN
SRN1-2 & 1A-1 are electronic subassemblies used to apply lower frequency (2 MHz) to enhance the performance of the plasma in process chambers. They differ from AMU by having a “fixed” match setting.
| Description | Our P/N | OEM P/N | OEM Process Tool |
|---|---|---|---|
| SRN 1-2 | 62266-001 | 27-132651-00 | Novellus / LAM Research Speed |
| SRN 1A-1 | 61631-001 | 27-053666-00 | Novellus / LAM Research Speed |