OEM Part Services

Repairs are always performed to OEM specification

The Repair Process

  1. Contact us (Please have the part number and serial number prepared)

  2. We will issue you an RMA number and an estimate

  3. Ship the part for evaluation and repair.

    Repair Tiers:

    Standard (Bronze)

    Extensive (Platinum)

One Year Standard Warranty because we are confident in the performance!

AMU

Name [Part #] [OEM Part #] [Process Tool]

10D-2 [2813-001] [914-92003-00 Rev 2] [Mattson Technology Aspen I & Aspen II]

10D-4,F7 [4032-002] [533-22801-00] [Mattson Technology Aspen III]

2-1 (V) [3944-001] [ 27-121645-00] [Novellus / LAM Research Sequel, Concept I & II]

10E-2 [3502-002] [27-118072-00] [Novellus / LAM Research Speed]

2-1(H) [2218-001] [27-032653-00] [Novellus / LAM Research Sequel, Concept I & II]

10D-1 [2741-001] [914-92003-00 Rev 1] [Mattson Technology Aspen I]

10D-4 [4032-001] [553-12708-00] [Mattson Technology Aspen III]

ECC

Name [Part #] [OEM Part #] [Process Tool]

ECC 1-1 [61648-001] [27-034079-01] [Novellus/LAM Research SPEED]

ECC 1-1M [62733-001] [27-266302-00] [Novellus/LAM Research]

ECC 1-4F [62671-001] [27-153218-00] [Novellus / LAM Research Sequel]

ECC 3-2 [62683-001] [27-285547-00] [Novellus / LAM Research]

SRN

SRN 1-2 [62266-001] [27-132651-00] [Novellus/LAM Research SPEED]

SRN 1A-1 [61631-001] [27-05666-00] [Novellus/LAM Research SPEED]